Repository logo
 
Publication

Analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes

2014-12Journal article Restricted access
Simple item page
dc.contributor.authorPereira, Pedro Jorge da Silva
dc.contributor.authorEscrivão, M. L.
dc.contributor.authorTeixeira, M. R.
dc.contributor.authorManeira, M. J. P.
dc.contributor.authorNunes, Y.
dc.date.accessioned2015-08-25T13:34:10Z
dc.date.available2015-08-25T13:34:10Z
dc.date.issued2014-12
dc.description.abstractThe erosion depth profile of planar targets in balanced and unbalanced magnetron cathodes with cylindrical symmetry is measured along the target radius. The magnetic fields have rotational symmetry. The horizontal and vertical components of the magnetic field B are measured at points above the cathode target with z = 2 x 10(-3) m. The experimental data reveal that the target erosion depth profile is a function of the angle. made by B with a horizontal line defined by z = 2 x 10(-3) m. To explain this dependence a simplified model of the discharge is developed. In the scope of the model, the pathway lengths of the secondary electrons in the pre-sheath region are calculated by analytical integration of the Lorentz differential equations. Weighting these lengths by using the distribution law of the mean free path of the secondary electrons, we estimate the densities of the ionizing events over the cathode and the relative flux of the sputtered atoms. The expression so deduced correlates for the first time the erosion depth profile of the target with the angle theta. The model shows reasonably good fittings to the experimental target erosion depth profiles confirming that ionization occurs mainly in the pre-sheath zone.por
dc.identifier.citationPEREIRA, Pedro Jorge da Silva; ESCRIVÃO, M. L.; TEIXEIRA, M. R.; MANEIRA, M. J. P.; NUNES, Y. – analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes. Plasma Sources Science & Technology. ISSN: 0963-0252. Vol. 23, nr. 6 (2014) Art. nr. 065031por
dc.identifier.doi10.1088/0963-0252/23/6/065031
dc.identifier.issn0963-0252
dc.identifier.issn1361-6595
dc.identifier.urihttp://hdl.handle.net/10400.21/4999
dc.language.isoengpor
dc.peerreviewedyespor
dc.publisherIOP Publishing LTDpor
dc.relation.ispartofseries065031
dc.subjectAnalytical Modelpor
dc.subjectTarget Erosion Profilepor
dc.subjectMagnetron Cathodespor
dc.titleAnalytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodespor
dc.typejournal article
dspace.entity.typePublication
oaire.citation.issue6por
oaire.citation.titlePlasma Sources Science & Technologypor
oaire.citation.volume23por
rcaap.rightsclosedAccesspor
rcaap.typearticlepor

Files

Original bundle
Now showing 1 - 1 of 1
No Thumbnail Available
Name:
ANALYTICAL MODEL AND MEASUREMENTS OF THE TARGET EROSION DEPTH PROFILE OF BALANCED AND UNBALANCED PLANAR MAGNETRON CATHODES.pdf
Size:
859.66 KB
Format:
Adobe Portable Document Format
Download
License bundle
Now showing 1 - 1 of 1
No Thumbnail Available
Name:
license.txt
Size:
1.71 KB
Format:
Item-specific license agreed upon to submission
Description:
Download

Collections

ISEL - Matemática - Artigos