Analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes

Pereira, Pedro Jorge da Silva; Escrivão, M. L.; Teixeira, M. R.; Maneira, M. J. P.; Nunes, Y.

Request a copy of the file

Enter the following information to request a copy for the following item: Analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes

Requesting the following file: ANALYTICAL MODEL AND MEASUREMENTS OF THE TARGET EROSION DEPTH PROFILE OF BALANCED AND UNBALANCED PLANAR MAGNETRON CATHODES.pdf

Back