Statistics for Analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes
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| Analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes | 59 |
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| ANALYTICAL MODEL AND MEASUREMENTS OF THE TARGET EROSION DEPTH PROFILE OF BALANCED AND UNBALANCED PLANAR MAGNETRON CATHODES.pdf | 1 |
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