Utilize este identificador para referenciar este registo: http://hdl.handle.net/10400.21/1743
Título: Cr2O3 thin films grown at room temperature by low pressure laser chemical vapour deposition
Autor: Sousa, P. M.
Silvestre, A. J.
Conde, O.
Palavras-chave: Chromium oxide
Thin films
Low pressure laser-assisted chemical vapor deposition
Particle size distribution
X-ray diffraction
aman spectroscopy
Chromium-oxide films
Nanophase CR2O3
Data: 31-Mar-2011
Editora: Elsevier Science SA
Citação: Sousa P M, Silvestre A J, Conde O. Cr2O3 thin films grown at room temperature by low pressure laser chemical vapour deposition. Thin Solid Film. 2011: 519 (11), 3653-3657.
Resumo: Chromia (Cr2O3) has been extensively explored for the purpose of developing widespread industrial applications, owing to the convergence of a variety of mechanical, physical and chemical properties in one single oxide material. Various methods have been used for large area synthesis of Cr2O3 films. However, for selective area growth and growth on thermally sensitive materials, laser-assisted chemical vapour deposition (LCVD) can be applied advantageously. Here we report on the growth of single layers of pure Cr2O3 onto sapphire substrates at room temperature by low pressure photolytic LCVD, using UV laser radiation and Cr(CO)(6) as chromium precursor. The feasibility of the LCVD technique to access selective area deposition of chromia thin films is demonstrated. Best results were obtained for a laser fluence of 120 mJ cm(-2) and a partial pressure ratio of O-2 to Cr(CO)(6) of 1.0. Samples grown with these experimental parameters are polycrystalline and their microstructure is characterised by a high density of particles whose size follows a lognormal distribution. Deposition rates of 0.1 nm s(-1) and mean particle sizes of 1.85 mu m were measured for these films. (C) 2011 Elsevier B.V. All rights reserved.
Peer review: yes
URI: http://hdl.handle.net/10400.21/1743
ISSN: 0040-6090
Aparece nas colecções:ISEL - Física - Artigos

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