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Sub-micron structuring of silicon using femtosecond laser interferometry

2013-12Journal article Open access
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dc.contributor.authorOliveira, Vitor
dc.contributor.authorVilar, R.
dc.contributor.authorSerra, R.
dc.contributor.authorOliveira, J.C.
dc.contributor.authorPolushkin, N.I.
dc.contributor.authorConde, O.
dc.date.accessioned2015-10-09T17:38:41Z
dc.date.available2015-10-09T17:38:41Z
dc.date.issued2013-12
dc.description.abstractWe report the fabrication of planar sub-micron gratings in silicon with a period of 720 nm using a modified Michelson interferometer and femtosecond laser radiation. The gratings consist of alternated stripes of laser ablated and unmodified material. Ablated stripes are bordered by parallel ridges which protrude above the unmodified material. In the regions where ridges are formed, the laser radiation intensity is not sufficient to cause ablation. Nevertheless, melting and a significant temperature increase are expected, and ridges may be formed due to expansion of silicon during resolidification or silicon oxidation. These conclusions are consistent with the evolution of the stripes morphology as a function of the distance from the center of the grating.pt_PT
dc.identifier10.1016/j.optlastec.2013.06.031
dc.identifier.citationOLIVEIRA, V.; [et al] – Sub-Micron structuring of silicon using femtosecond laser interferometry. Optics & Laser Technology. ISSN: 0030-3992. Vol. 54 (2013), pp. 428-431pt_PT
dc.identifier.doi10.1016/j.optlastec.2013.06.031
dc.identifier.issn0030-3992
dc.identifier.urihttp://hdl.handle.net/10400.21/5267
dc.language.isoengpt_PT
dc.peerreviewedyespt_PT
dc.publisherElsevierpt_PT
dc.relationSSFRH/BPD 17382712010pt_PT
dc.relationEngineering spin textures for magnetoelectronics
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/pt_PT
dc.subjectSilicon Patterningpt_PT
dc.subjectFemtosecond Laserpt_PT
dc.subjectMichelson Interferometerpt_PT
dc.titleSub-micron structuring of silicon using femtosecond laser interferometrypt_PT
dc.typejournal article
dspace.entity.typePublication
oaire.awardTitleEngineering spin textures for magnetoelectronics
oaire.awardURIinfo:eu-repo/grantAgreement/FCT/3599-PPCDT/PTDC%2FFIS%2F121588%2F2010/PT
oaire.citation.endPage431pt_PT
oaire.citation.startPage428pt_PT
oaire.citation.titleOptics & Laser Technologypt_PT
oaire.citation.volumeVol. 54pt_PT
oaire.fundingStream3599-PPCDT
person.familyNameOliveira
person.givenNameVitor
person.identifier.ciencia-idDA1C-25BD-5974
person.identifier.orcid0000-0002-1757-4524
person.identifier.ridA-3058-2009
person.identifier.scopus-author-id7006105706
project.funder.identifierhttp://doi.org/10.13039/501100001871
project.funder.nameFundação para a Ciência e a Tecnologia
rcaap.rightsclosedAccesspt_PT
rcaap.typearticlept_PT
relation.isAuthorOfPublication269ff9af-427f-4d1d-949c-cd77cd386e9f
relation.isAuthorOfPublication.latestForDiscovery269ff9af-427f-4d1d-949c-cd77cd386e9f
relation.isProjectOfPublication3a18ec27-1a3b-47f6-adde-3b1f0f58c3d8
relation.isProjectOfPublication.latestForDiscovery3a18ec27-1a3b-47f6-adde-3b1f0f58c3d8

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