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Simulation analysis of a thin film semiconductor MMI 3dB splitter operating in the visible range

dc.contributor.authorLourenço, Paulo
dc.contributor.authorFantoni, Alessandro
dc.contributor.authorVieira, Manuela
dc.date.accessioned2019-10-11T08:41:42Z
dc.date.available2019-10-11T08:41:42Z
dc.date.issued2019
dc.descriptionEste trabalho foi financiado pelo Concurso Anual para Projetos de Investigação, Desenvolvimento, Inovação e Criação Artística (IDI&CA) 2018 do Instituto Politécnico de Lisboa. Código de referência IPL/2018/aSiPhoto_ISEL
dc.description.abstractIn this paper we present a simulation study that intends to characterize the influence of defects introduced by manufacturing processes on the geometry of a semiconductor structure suitable to be used as a multimode interference (MMI) 3 dB power splitter. Consequently, these defects will represent refractive index fluctuations which, on their turn, will drastically affect the propagation conditions within the structure. Our simulations were conducted on a software platform that implements both Beam Propagation and FDTD numerical methods. This work supports the development of a biomedical plasmonic sensor, which is based on the coupling between the propagating modes in a dielectric waveguide and the surface plasmon mode that is generated on an overlaid metallic thin film, and where the output readout is achieved through an a-Si:H photodiode. By using a multimode interference 1×2 power splitter, this sensor device can utilize the non-sensing arm as a reference one, greatly facilitating its calibration and enhanced performance. Amorphous silicon can be deposited by PECVD processes at temperatures lower than 300°C, an attractive characteristic which makes it back-end compatible to CMOS fabrication processes. As the spectral sensitivity of amorphous silicon is restricted to the visible range, this sensing device should be operating on a wavelength not higher than 700 nm, thus a-SiNx has been the material hereby proposed for both waveguides and MMI power splitter.pt_PT
dc.description.versioninfo:eu-repo/semantics/publishedVersionpt_PT
dc.identifier.citationLOURENÇO, Paulo; FANTONI, Alessandro; VIEIRA, Manuela – Simulation analysis of a thin film semiconductor MMI 3dB splitter operating in the visible range. In Proceedings of SPIE, AOP 2019 - IV International Conference on Applications of Optics and Photonics. Lisbon, Portugal: SPIE, 2019. ISSN 0277-786X. Vol. 11207. Pp. 112070J-1- 112070J-4pt_PT
dc.identifier.doi10.1117/12.2526656pt_PT
dc.identifier.issn0277-786X
dc.identifier.issn1996-756X
dc.identifier.urihttp://hdl.handle.net/10400.21/10549
dc.language.isoengpt_PT
dc.publisherSociety of Photo-optical Instrumentation Engineerspt_PT
dc.relationPTDC/NAN-OPT/31311/2017 - FCTpt_PT
dc.relationSFRH/BPD/102217/2014 - FCTpt_PT
dc.relationProjeto financiado no âmbito do Concurso de Projetos de Investigação, Desenvolvimento, Inovação & Criação Artística (IDI&CA) financiados pelo Instituto Politécnico de Lisboa.IPL/2018/aSiPhoto_ISELpt_PT
dc.subjectSurface plasmon resonancept_PT
dc.subjectBeam propagation methodpt_PT
dc.subjectFinite differences time domainpt_PT
dc.subjectMultimode interferencept_PT
dc.subject3 dB splitterpt_PT
dc.titleSimulation analysis of a thin film semiconductor MMI 3dB splitter operating in the visible rangept_PT
dc.typeconference object
dspace.entity.typePublication
oaire.citation.conferencePlace31 May-04 June 2019 - Lisbon, Portugalpt_PT
oaire.citation.endPage112070J-4pt_PT
oaire.citation.startPage112070J-1pt_PT
oaire.citation.titleIV International Conference on Applications of Optics and Photonicspt_PT
oaire.citation.volume11207pt_PT
person.familyNameLourenço
person.familyNameFantoni
person.familyNameVieira
person.givenNamePaulo
person.givenNameAlessandro
person.givenNameManuela
person.identifier10792
person.identifier.ciencia-id431F-5C2C-00FB
person.identifier.ciencia-id241E-E87C-552F
person.identifier.ciencia-id9516-E25E-BB8E
person.identifier.orcid0000-0002-8785-445X
person.identifier.orcid0000-0002-9938-0351
person.identifier.orcid0000-0002-1150-9895
person.identifier.ridK-1105-2016
person.identifier.ridV-7860-2017
person.identifier.scopus-author-id7006535604
person.identifier.scopus-author-id7202140173
rcaap.rightsclosedAccesspt_PT
rcaap.typeconferenceObjectpt_PT
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relation.isAuthorOfPublication9f35eb1e-83e4-4342-a86d-265604301499
relation.isAuthorOfPublicationb77c6785-9cfb-4cd4-90b5-c2b816bd7d11
relation.isAuthorOfPublication.latestForDiscoveryb77c6785-9cfb-4cd4-90b5-c2b816bd7d11

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