Publicação
Laser-assisted deposition of thin films from photoexcited vapour phases
| dc.contributor.author | Conde, O. | |
| dc.contributor.author | Silvestre, António Jorge | |
| dc.date.accessioned | 2012-09-10T16:27:57Z | |
| dc.date.available | 2012-09-10T16:27:57Z | |
| dc.date.issued | 2004-08 | |
| dc.description.abstract | Laser-assisted chemical vapour deposition (LCVD) has been extensively studied in the last two decades. A vast range of applications encompass various areas such as microelectronics, micromechanics, microelectromechanics and integrated optics, and a variety of metals, semiconductors and insulators have been grown by LCVD. In this article, we review briefly the LCVD process and present two case studies of thin film deposition related to laser thermal excitation (e.g., boron carbide) and non-thermal excitation (e.g., CrO(2)) of the gas phase. | por |
| dc.identifier.citation | Conde O, Silvestre, A J. Laser-assisted deposition of thin films from photoexcited vapour phases. Applied Physics A-Materials Science & Processing. ISSN: 0947-8396. 2004: 79 (3), 489-497. | por |
| dc.identifier.issn | 0947-8396 | |
| dc.identifier.uri | http://hdl.handle.net/10400.21/1761 | |
| dc.language.iso | eng | por |
| dc.peerreviewed | yes | por |
| dc.publisher | Springer | por |
| dc.subject | Chromium-Oxide Films | por |
| dc.subject | Dioxide CRO2 Films | por |
| dc.subject | Boron-Carbide | por |
| dc.subject | Spin Polarization | por |
| dc.subject | Carbon Precursor | por |
| dc.subject | Infrared-Spectra | por |
| dc.subject | Point-Contact | por |
| dc.subject | Growth | por |
| dc.subject | CR(CO)6 | por |
| dc.subject | Metal | por |
| dc.title | Laser-assisted deposition of thin films from photoexcited vapour phases | por |
| dc.type | journal article | |
| dspace.entity.type | Publication | |
| oaire.citation.conferencePlace | New York | por |
| oaire.citation.endPage | 497 | por |
| oaire.citation.issue | 3 | por |
| oaire.citation.startPage | 489 | por |
| oaire.citation.title | Applied Physics A-Materials Science & Processing | por |
| oaire.citation.volume | 79 | por |
| person.familyName | Silvestre | |
| person.givenName | António Jorge | |
| person.identifier.orcid | 0000-0001-6517-6275 | |
| person.identifier.scopus-author-id | 25224208600 | |
| rcaap.rights | restrictedAccess | por |
| rcaap.type | article | por |
| relation.isAuthorOfPublication | da27d795-d2eb-4f8c-bfa5-7053ef20f339 | |
| relation.isAuthorOfPublication.latestForDiscovery | da27d795-d2eb-4f8c-bfa5-7053ef20f339 |