Repository logo
 
Publication

Particle agglomeration study in rf silane plasmas: In situ study by polarization-sensitive laser light scattering

1996-08-15Journal article Restricted access
Simple item page
dc.contributor.authorCourteille, C.
dc.contributor.authorHollenstein, C.
dc.contributor.authorDorier, J. L.
dc.contributor.authorGay, P.
dc.contributor.authorSchwarzenbach, W.
dc.contributor.authorHowling, A. A.
dc.contributor.authorBertran, E.
dc.contributor.authorViera, G.
dc.contributor.authorMartins, R.
dc.contributor.authorMaçarico, António Filipe Ruas da Trindade
dc.date.accessioned2014-06-02T14:04:50Z
dc.date.available2014-06-02T14:04:50Z
dc.date.issued1996-08-15
dc.description.abstractTo determine self-consistently the time evolution of particle size and their number density in situ multi-angle polarization-sensitive laser light scattering was used. Cross-polarization intensities (incident and scattered light intensities with opposite polarization) measured at 135 degrees and ex situ transmission electronic microscopy analysis demonstrate the existence of nonspherical agglomerates during the early phase of agglomeration. Later in the particle time development both techniques reveal spherical particles again. The presence of strong cross-polarization intensities is accompanied by low-frequency instabilities detected on the scattered light intensities and plasma emission. It is found that the particle radius and particle number density during the agglomeration phase can be well described by the Brownian free molecule coagulation model. Application of this neutral particle coagulation model is justified by calculation of the particle charge whereby it is shown that particles of a few tens of nanometer can be considered as neutral under our experimental conditions. The measured particle dispersion can be well described by a Brownian free molecule coagulation model including a log-normal particle size distribution. (C) 1996 American Institute of Physics.por
dc.identifier.citationCOURTEILLE, C.; HOLLENSTEIN, C.; DORIER, J. L.; GAY, P.; SCHWARZENBACH, W. ; HOWLING, A. A.; BERTRAN, E.; VIERA, G.; MARTINS, R.; MAÇARICO, A. - Particle agglomeration study in rf silane plasmas: In situ study by polarization-sensitive laser light scattering. Journal of Apllied Physics. ISSN 0021-8979. Vol. 80, nr. 4 (1996), p. 2069-2078.por
dc.identifier.issn0021-8979
dc.identifier.other10.1063/1.363118
dc.identifier.urihttp://hdl.handle.net/10400.21/3599
dc.language.isoengpor
dc.peerreviewedyespor
dc.publisherAmer Inst Physicspor
dc.relation.publisherversionhttp://scitation.aip.org/content/aip/journal/jap/80/4/10.1063/1.363118por
dc.subjectTrapping Phenomenapor
dc.subjectGlow-Dischargepor
dc.subjectContaminationpor
dc.subjectTransportpor
dc.titleParticle agglomeration study in rf silane plasmas: In situ study by polarization-sensitive laser light scatteringpor
dc.typejournal article
dspace.entity.typePublication
oaire.citation.conferencePlaceNew Yorkpor
oaire.citation.endPage2078por
oaire.citation.issue4por
oaire.citation.startPage2069por
oaire.citation.titleJournal of Apllied Physicspor
oaire.citation.volume80por
rcaap.rightsrestrictedAccesspor
rcaap.typearticlepor

Files

Original bundle
Now showing 1 - 1 of 1
No Thumbnail Available
Name:
Particle agglomeration study in rf silane plasmas.pdf
Size:
471.72 KB
Format:
Adobe Portable Document Format
Download
License bundle
Now showing 1 - 1 of 1
No Thumbnail Available
Name:
license.txt
Size:
1.71 KB
Format:
Item-specific license agreed upon to submission
Description:
Download

Collections

ISEL - Física - Artigos