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Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation

2019-12-01Journal article Restricted access
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dc.contributor.authorVygranenko, Yuri
dc.contributor.authorFernandes, Miguel
dc.contributor.authorVieira, Manuela
dc.contributor.authorLavareda, Guilherme
dc.contributor.authorCARVALHO, CARLOS
dc.contributor.authorBrogueira, P.
dc.contributor.authorAmaral, Ana
dc.date.accessioned2020-04-07T15:57:05Z
dc.date.available2020-04-07T15:57:05Z
dc.date.issued2019-12-01
dc.descriptionEste trabalho foi financiado pelo Concurso Anual para Projetos de Investigação, Desenvolvimento, Inovação e Criação Artística (IDI&CA) 2016 do Instituto Politécnico de Lisboa. Código de referência IPL/2016/SolWin_ISEL
dc.description.abstractThis work reports on low temperature deposition of conducing indium oxide films by a radio-frequency plasma enhanced reactive thermal evaporation (rf-PERTE) technique. The films were deposited on polyethylene terephthalate (PET) without intentional heating of the substrate and at elevated temperatures up to 150 degrees C. The material stoichiometry was accurately controlled by adjusting deposition conditions including the oxygen flow, process pressure, pumping speed, and RF-power. Besides, fine turning of the critical deposition parameters during the deposition was implemented by measuring the variation of film conductance in-situ. The film morphology was analyzed by scanning electron microscopy. Hall effect measurements were also performed to determine the relation between the deposition conditions and the electrical properties of the films. A resistivity of 4 x 10(-4) Omega-cm was reached under optimized deposition conditions. A 250 nm-thick coating with 16 Omega/sq sheet resistance shows an 82% peak value of transmittance in the visible spectral range.pt_PT
dc.description.versioninfo:eu-repo/semantics/publishedVersionpt_PT
dc.identifier.citationVYGRANENKO, Yuri.; [et al] – Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation. Thin Solid Films. ISSN 0040-6090. Vol. 691 (2019), pp. 1-4pt_PT
dc.identifier.doi10.1016/j.tsf.2019.137604pt_PT
dc.identifier.issn0040-6090
dc.identifier.urihttp://hdl.handle.net/10400.21/11428
dc.language.isoengpt_PT
dc.peerreviewedyespt_PT
dc.publisherElsevierpt_PT
dc.relationSFRH/BPD/102217/2014 - FCTpt_PT
dc.relationUID/CTM/04540/2019 - CeFEMApt_PT
dc.relationProjeto financiado no âmbito do Concurso de Projetos de Investigação, Desenvolvimento, Inovação & Criação Artística (IDI&CA) financiados pelo Instituto Politécnico de Lisboa. 2016 do Instituto Politécnico de Lisboa. Código de referência IPL/2016/SolWin_ISELpt_PT
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dc.subjectFlexible electronicspt_PT
dc.subjectIndium oxidept_PT
dc.subjectThin-filmspt_PT
dc.subjectReactive thermal evaporationpt_PT
dc.subjectElectrical propertiespt_PT
dc.subjectOptical propertiespt_PT
dc.titleConducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporationpt_PT
dc.typejournal article
dspace.entity.typePublication
oaire.citation.endPage4pt_PT
oaire.citation.startPage1pt_PT
oaire.citation.titleThin Solid Filmspt_PT
oaire.citation.volume691pt_PT
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