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Sensor element for a metal-insulator-semiconductor camera system (MISCam)

2004-09-21Journal article Open access
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dc.contributor.authorSchwarz, R.
dc.contributor.authorFernandes, Miguel
dc.contributor.authorMartins, J.
dc.contributor.authorFantoni, Alessandro
dc.contributor.authorVieira, Manuela
dc.contributor.authorSanguino, P.
dc.contributor.authorCarvalho, C. N.
dc.contributor.authorMuschik, T.
dc.date.accessioned2012-03-23T15:13:32Z
dc.date.available2012-03-23T15:13:32Z
dc.date.issued2004-09-21
dc.description.abstractWe discuss the operation of a new type of optical sensor (MISCam) based on a metal-insulator-semiconductor (MIS) structure. The operation principle relies on light-induced changes of the band bending and barrier height at the interface between semiconductor and insulator. An image is obtained from the quenching of the ac signal in analogy to the principle of the laser-scanned photodiode (LSP). Lateral resolution depends on the semiconductor material chosen. We have characterised the MIS structures by C-V, I-V, and spectral response measurements testing different types of insulators like a-Si3N4, SiO2, and AlN. The presence of slow interface charges allows for image memory. Colour sensors can be realised by controlling sign and magnitude of the electric fields in the base and the interface region.por
dc.identifier.citationSCHWARZ, R.; [et al] – Sensor element for a metal-insulator-semiconductor camera system (MISCam). Sensors and Actuators A: Physical. ISSN 0924-4247. Vol. 115, N.º 2-3 (2004), pp. 331-335.por
dc.identifier.doi10.1016/j.sna.2004.03.074
dc.identifier.issn0924-4247
dc.identifier.urihttp://hdl.handle.net/10400.21/1354
dc.language.isoengpor
dc.peerreviewedyespor
dc.publisherElsevier Science SApor
dc.subjectMIS detectorpor
dc.subjectImage sensorpor
dc.subjectC-V curvepor
dc.subjectSpectral responsepor
dc.titleSensor element for a metal-insulator-semiconductor camera system (MISCam)por
dc.typejournal article
dspace.entity.typePublication
oaire.citation.conferencePlaceLausannepor
oaire.citation.endPage335por
oaire.citation.issue2-3por
oaire.citation.startPage331por
oaire.citation.titleSensors and Actuators A: Physicalpor
oaire.citation.volume115
person.familyNameFernandes
person.familyNameFantoni
person.familyNameVieira
person.givenNameMiguel
person.givenNameAlessandro
person.givenNameManuela
person.identifier10792
person.identifier.ciencia-idDD1B-859F-EB0B
person.identifier.ciencia-id241E-E87C-552F
person.identifier.ciencia-id9516-E25E-BB8E
person.identifier.orcid0000-0002-0765-474X
person.identifier.orcid0000-0002-9938-0351
person.identifier.orcid0000-0002-1150-9895
person.identifier.ridK-1105-2016
person.identifier.ridV-7860-2017
person.identifier.scopus-author-id24450183800
person.identifier.scopus-author-id7006535604
person.identifier.scopus-author-id7202140173
rcaap.rightsrestrictedAccesspor
rcaap.typearticlepor
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relation.isAuthorOfPublication.latestForDiscoveryb77c6785-9cfb-4cd4-90b5-c2b816bd7d11

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