Publication
Mass spectrometry improvement on an high current ion implanter
| dc.contributor.author | Lopes, J. Gabriel | |
| dc.contributor.author | Alegria, F. C. | |
| dc.contributor.author | Luis Redondo | |
| dc.contributor.author | Rocha, J. | |
| dc.contributor.author | Alves, E. | |
| dc.date.accessioned | 2013-02-15T16:25:52Z | |
| dc.date.available | 2013-02-15T16:25:52Z | |
| dc.date.issued | 2011-12-15 | |
| dc.description.abstract | The development of accurate mass spectrometry, enabling the identification of all the ions extracted from the ion source in a high current implanter is described. The spectrometry system uses two signals (x-y graphic), one proportional to the magnetic field (x-axes), taken from the high-voltage potential with an optic fiber system, and the other proportional to the beam current intensity (y-axes), taken from a beam-stop. The ion beam mass register in a mass spectrum of all the elements magnetically analyzed with the same radius and defined by a pair of analyzing slits as a function of their beam intensity is presented. The developed system uses a PC to control the displaying of the extracted beam mass spectrum, and also recording of all data acquired for posterior analysis. The operator uses a LabView code that enables the interfacing between an I/O board and the ion implanter. The experimental results from an ion implantation experiment are shown. (C) 2011 Elsevier B.V. All rights reserved. | por |
| dc.identifier.citation | LOPES, J. G.; ALEGRIAl, F. C.; REDONDO, L. M.; ROCHA, J.; ALVESl, E. - Mass spectrometry improvement on an high current ion implanter. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms. ISSN 0168-583X. Vol. 269, n.º 24 (2011) p. 3222-3225. | por |
| dc.identifier.issn | 0168-583X | |
| dc.identifier.uri | http://hdl.handle.net/10400.21/2212 | |
| dc.language.iso | eng | por |
| dc.peerreviewed | yes | por |
| dc.publisher | Elsevier Science BV | por |
| dc.subject | High current ion implanter | por |
| dc.subject | LabView | por |
| dc.subject | Mass spectrum | por |
| dc.subject | Hyperfine interactions | por |
| dc.subject | Sapphire | por |
| dc.subject | Beam | por |
| dc.title | Mass spectrometry improvement on an high current ion implanter | por |
| dc.type | journal article | |
| dspace.entity.type | Publication | |
| oaire.citation.conferencePlace | Amsterdam | por |
| oaire.citation.endPage | 3225 | por |
| oaire.citation.issue | 24 | por |
| oaire.citation.startPage | 3222 | por |
| oaire.citation.title | Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms | por |
| oaire.citation.volume | 269 | por |
| person.familyName | Redondo | |
| person.givenName | Luis | |
| person.identifier | 1017419 | |
| person.identifier.ciencia-id | 5E13-9730-4651 | |
| person.identifier.orcid | 0000-0002-2381-4627 | |
| person.identifier.rid | A-3078-2009 | |
| person.identifier.scopus-author-id | 7003990641 | |
| rcaap.rights | restrictedAccess | por |
| rcaap.type | article | por |
| relation.isAuthorOfPublication | 1d3e3435-66c8-4d32-8ffc-d5798a8533a4 | |
| relation.isAuthorOfPublication.latestForDiscovery | 1d3e3435-66c8-4d32-8ffc-d5798a8533a4 |
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