Optimisation of a plasmonic parallel waveguide sensor based on amorphous silicon compounds

Costa, João; Fantoni, Alessandro; Lourenço, Paulo; Vieira, Manuela

http://hdl.handle.net/10400.21/15739

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Abstract(s)

This work reports the simulation of a plasmonic waveguide sensor working in the visible range based on amorphous silicon compounds. Typical plasmonic sensor interrogation schemes are based on scanning over the wavelength or the incident angle to search for the resonance condition. These solutions usually require expensive or bulky components, such as prisms, motor-driven rotation stages or tunable lasers. In this work we propose an amorphous silicon nitride waveguide structure consisting of an array of parallel surface plasmon interferometers of different lengths, each one comprising a thin layer of aluminium embedded into the waveguide. Using modal decomposition simulations, we show that the variation of the output power at the end of each waveguide array element provides a convenient interrogation scheme. By exploring amorphous silicon compounds that can be deposited by Pressure Enhanced Chemical Vapor Deposition (PECVD) at low temperatures, we aim to achieve a low-cost fabrication process that is compatible with backend CMOS processing and wavelengths in the visible range.

Keywords

Plasmonic sensor Waveguide Array MMI Interferometer

URI

http://hdl.handle.net/10400.21/15739

Citation

COSTA, João; FANTONI, Alessandro; LOURENÇO, Paulo; VIEIRA, Manuela - Optimisation of a plasmonic parallel waveguide sensor based on amorphous silicon compounds, In Proc. SPIE 11354, Optical Sensing and Detection VI, 113542K (13 April 2020)