Utilize este identificador para referenciar este registo: http://hdl.handle.net/10400.21/2212
Título: Mass spectrometry improvement on an high current ion implanter
Autor: Lopes, J. Gabriel
Alegria, F. C.
Redondo, Luís Manuel dos Santos
Rocha, J.
Alves, E.
Palavras-chave: High current ion implanter
Mass spectrum
Hyperfine interactions
Data: 15-Dez-2011
Editora: Elsevier Science BV
Citação: LOPES, J. G.; ALEGRIAl, F. C.; REDONDO, L. M.; ROCHA, J.; ALVESl, E. - Mass spectrometry improvement on an high current ion implanter. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms. ISSN 0168-583X. Vol. 269, n.º 24 (2011) p. 3222-3225.
Resumo: The development of accurate mass spectrometry, enabling the identification of all the ions extracted from the ion source in a high current implanter is described. The spectrometry system uses two signals (x-y graphic), one proportional to the magnetic field (x-axes), taken from the high-voltage potential with an optic fiber system, and the other proportional to the beam current intensity (y-axes), taken from a beam-stop. The ion beam mass register in a mass spectrum of all the elements magnetically analyzed with the same radius and defined by a pair of analyzing slits as a function of their beam intensity is presented. The developed system uses a PC to control the displaying of the extracted beam mass spectrum, and also recording of all data acquired for posterior analysis. The operator uses a LabView code that enables the interfacing between an I/O board and the ion implanter. The experimental results from an ion implantation experiment are shown. (C) 2011 Elsevier B.V. All rights reserved.
Peer review: yes
URI: http://hdl.handle.net/10400.21/2212
ISSN: 0168-583X
Aparece nas colecções:ISEL - Eng. Electrotécn. - Artigos

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