Utilize este identificador para referenciar este registo: http://hdl.handle.net/10400.21/8270
Título: Simple general purpose ion beam deceleration system using a single electrode lens
Autor: Lopes, J.
Rocha, J.
Palavras-chave: Deceleration
Low energy
Positive ion beam
Data: 2015
Editora: Scientific Research Publishing
Citação: LOPES, J.; ROCHA, J. – Simple general purpose ion beam deceleration system using a single electrode lens. World Journal of Engineering and Technology. ISSN 2331-4222. Vol. 3, (2015), pp. 127-133.
Resumo: Ion beam deceleration properties of a newly developed low-energy ion beam implantation system were studied. The objective of this system was to produce general purpose low-energy (5 to 15 keV) implantations with high current beam of hundreds of μA level, providing the most wide implantation area possible and allowing continuously magnetic scanning of the beam over the sample(s). This paper describes the developed system installed in the high-current ion implanter at the Laboratory of Accelerators and Radiation Technologies of the Nuclear and Technological Campus, Sacavém, Portugal (CTN).
Peer review: yes
URI: http://hdl.handle.net/10400.21/8270
DOI: http://dx.doi.org/10.4236/wjet.2015.33014
ISSN: 2331-4222
2331-4249
Versão do Editor: http://file.scirp.org/pdf/WJET_2015080614543190.pdf
Aparece nas colecções:ISEL - Eng. Electrotécn. - Artigos

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